Director/PDMR Shareholding

Oxford Instruments plc                             

                              Directors' Dealings                              

Oxford Instruments plc announces that on 28 May 2010 the following executive
directors purchased ordinary shares of 5 pence at a cost of 262.72p per share
as "partnership shares" under the all-employee Oxford Instruments Share
Incentive Plan as summarised below:

       Executive Director            No. of Partnership Shares acquired    
                                                                           
           Kevin Boyd                                48                    
                                                                           
         Jonathan Flint                              48                    
                                                                           
        Charles Holroyd                              48                    

The above transactions were undertaken by the trustee of the Oxford Instruments
Share Incentive Plan, a UK registered company, on behalf of the above
individuals and the shares purchased on the PLUS Exchange.

In connection with the above purchases of Partnership Shares on the same date
the executive directors were awarded ordinary shares of 5 pence as "matching
shares" under the all employee Oxford Instruments Share Incentive Plan as
summarised below:

       Executive Director          Number of shares awarded as "matching   
                                                  shares"                  
                                                                           
           Kevin Boyd                                9                     
                                                                           
         Jonathan Flint                              9                     
                                                                           
        Charles Holroyd                              9                     

To fully hedge the above awards the Trustee of the Oxford Instruments Share
Incentive Plan purchased such number of shares in the open market at a cost of
262.72p per share.

The risk of forfeiture attached to the matching shares will normally be removed
on the third anniversary of allocation subject to continued employment and the
retention of the partnership shares in connection with which they were awarded.

No consideration was paid by the grantees for the award of the matching shares
and no consideration is due on the release of the matching shares.

The above notifications are made in accordance with Rule 3.1.4 of the UKLA
Disclosure Rules and Transparency Rules.

Oxford Instruments plc was notified of the above transactions on 1 June 2010.

Name of contact and telephone number for queries: Susan Johnson-Brett, 01865
393324.

For and on behalf of Oxford Instruments plc

Date: 1 June 2010